Large area ion implantation process and apparatus

ABSTRACT

A large area ion implantation apparatus which selects ions having predetermined characteristics for implantation. The ions having predetermined characteristics are selected from a plasma contained within a magnetic bottle and heated by a radio frequency source. The selected ions in one embodiment escape from the magnetic bottle and bombard a substrate located external to the magnetic bottle. In another embodiment the selected ions are retained within the magnetic bottle and bombard a substrate which is also located within the bottle. In yet another embodiment of the apparatus, a positive potential on an electrostatic grid located between the substrate and the plasma prevents ions from bombarding a substrate maintained at a negative potential until the potential on the grid is reduced to approximately zero volts.

CROSS REFERENCE TO RELATED APPLICATIONS

This is a division of application Ser. No. 08/230,327, filed Apr. 20,1994.

FIELD OF THE INVENTION

The invention relates generally to the field of ion implantation devicesand specifically to ion implantation devices utilizing plasma immersion.

BACKGROUND OF THE INVENTION

Ion implantation is used in semiconductor wafer fabrication to addimpurities (ions having certain electronic characteristics) to asubstrate. One form of ion implantation apparatus utilizes an ion beamwhich is scanned over the surface of the wafer. The ions of the beam areproduced with sufficient energy that they are implanted into the wafermaterial. The problem with this method of ion implantation is that theamount of time it takes to scan an ion beam over the surface of a waferincreases significantly as the wafer area increases.

A second method used for large wafer ion implantation is termed plasmaimmersion. In this method, a wafer is positioned within a plasma and ispulse biased to a highly negative voltage. The ions of the plasmabombard the wafer and are implanted. The problem associated with thismethod is that the ions of the plasma which bombard the wafer have adistribution of energies and as a result the ions which are implantedpenetrate into the wafer to various depths. This results in anon-uniform implantation layer. Furthermore, this method has no controlover the composition of the ion species implanted since all of thepositive ion species in the plasma will be implanted. To avoid theseundesirable effects, the energy distribution of the ions bombarding thesubstrate must be controlled and the composition of the ion species forimplantation must be limited.

SUMMARY OF THE INVENTION

The invention relates to an ion implantation device for implanting awafer with ions having certain predetermined characteristics. A magneticbottle is used to hold a plasma from which the ions to be implanted areselected. A radio frequency source heats certain ions of the plasmaselectively. Depending upon the ions chosen for implantation and theembodiment of the implantation apparatus, these ions are either retainedwithin the magnetic bottle or permitted to escape from the magneticbottle. If the ions retained within the magnetic bottle are to beselected for implantation, the substrate to be implanted is positionedwithin the magnetic bottle. If the ions which are permitted to escapefrom the magnetic bottle are to be selected for implantation, thesubstrate to be implanted is positioned external to the magnetic bottle.

In one embodiment, the ion implantation apparatus includes a magneticbottle for selectively retaining ions, an ion cyclotron resonantfrequency device for selectively heating ions retained within themagnetic bottle and a substrate holder positioned to expose a substrateto ions selectively retained within the magnetic bottle. Ions not havingthe required predetermined characteristics are permitted to escape fromthe magnetic bottle. Those ions which are selectively retained withinthe bottle bombard the substrate, thereby exposing the substrateprimarily to those ions having the required predeterminedcharacteristics.

In a second embodiment the ion implantation apparatus includes amagnetic bottle for selectively retaining ions, a ion cyclotron resonantfrequency device for selectively heating ions retained within themagnetic bottle and a substrate holder positioned to expose a substrateto ions which escape from the magnetic bottle. Ions having predeterminedcharacteristics are permitted to escape from the magnetic bottle. Ionswhich are selectively permitted to escape from the magnetic bottlebombard the substrate thereby exposing the substrate primarily to thoseions having the required predetermined characteristics.

In yet another embodiment of the ion implantation apparatus, anelectrostatic grid is positioned between the plasma and the waferholder. The wafer holder is maintained at a large negative potentialrelative to the potential of the plasma. The electrostatic grid isperiodically set to a positive potential greater than the potential ofthe plasma and periodically set to zero potential. When the grid is setto the positive potential, the positive ions of the plasma are preventedfrom reaching the wafer. When the grid is set to zero potential thepositive ions of the plasma are accelerated by the high negativepotential of the wafer holder and are implanted into the wafer to adesired depth.

The invention also relates to a method of ion implantation by exposing asubstrate to implantation ions having certain predeterminedcharacteristics.

In one embodiment, the method includes the steps of selectivelyretaining ions within a magnetic bottle and selectively heating the ionsretained within the magnetic bottle with a ion cyclotron resonantfrequency device. Ions which do not have predetermined characteristicsare permitted to escape from the magnetic bottle. A substrate is exposedto ions having predetermined characteristics which are selectivelyretained within the magnetic bottle.

In another embodiment the method includes the steps of selectivelyretaining ions within a magnetic bottle, selectively heating ionsretained within the magnetic bottle with a ion cyclotron resonantfrequency device, thereby permitting ions having predeterminedcharacteristics to escape from the magnetic bottle, and exposing asubstrate to ions having predetermined characteristics which escape fromthe magnetic bottle.

In yet another embodiment, the method includes the steps of placing anelectrostatic grid between the plasma and the wafer holder, maintainingthe wafer holder at a large negative potential relative to the potentialof the plasma, periodically setting the electrostatic grid to a positivepotential greater than the potential of the plasma, periodically settingthe electrostatic grid to zero potential and exposing a substrate topositive ions which are accelerated by the negative potential on thesubstrate holder when the electrostatic grid is set to zero potential.

DESCRIPTION OF THE DRAWINGS

This invention is pointed out with particularity in the appended claims.The above and further advantages of this invention may be betterunderstood by referring to the following description taken inconjunction with the accompanying drawing, in which:

FIG. 1 is an embodiment of a magnetic bottle known to the prior art;

FIG. 2 is a graph of the normalized particle density plotted against thenormalized particle drift velocity for various values of velocitycomponent ratios;

FIG. 3 is an embodiment of the ion implantation apparatus of theinvention which retains ions having predefined characteristics within aconfinement region within which is placed a wafer to be implanted;

FIG. 3(a) is a graph of the perpendicular temperature plotted againstρ/a for an ion heated using a simple loop ICRH antenna in an 800Gmagnetic field;

FIG. 3(b) is a graph of the perpendicular temperature plotted againstρ/a for an ion heated using a simple loop ICRH antenna in an 8 kGmagnetic field;

FIG. 4 is another embodiment of the ion implantation apparatus of theinvention which permits ions having predefined characteristics to passfrom a confinement region to a region within which is positioned a waferto be implanted;

FIG. 5 is an embodiment of the ion implantation apparatus of FIG. 3,including an electrostatic grid; and

FIG. 5a is a graph of the potential on the various structures of the ionimplantation apparatus of FIG. 5.

DETAILED DESCRIPTION OF THE INVENTION

Plasma containment devices termed magnetic bottles are well known to theprior art. Referring to FIG. 1, a magnetic bottle 10 typically consistsof an elongated vacuum chamber 20 with a toroidal electromagnet 30, 30'located at each end. The two toroidal electromagnets 30, 30' develop amagnetic field 32 within the vacuum chamber 20. The magnetic field 32has the highest field density B_(m) at the regions of convergence R₁, R₂adjacent the electromagnets 30, 30' compared to the field density B_(o),in the region between the electromagnets 30, 30'.

A plasma is either created within the magnetic bottle 10 or injectedinto the magnetic bottle 10. Ions of the plasma located within themagnetic bottle 10 move from one end of the magnetic bottle 10 to theother end by spiraling or gyrating 34 along the field lines 32. Theseions have a velocity v which has a radial velocity component v_(r)perpendicular to the field line 32 and an axial velocity component v_(a)parallel to the field line 32.

Ions with ratios of v_(r) to v_(a) above a certain value, which isdetermined by the charge and mass of the ion, are reflected by theconverging magnetic field regions R₁, R₂ back toward the center of themagnetic bottle 10. These regions of converging magnetic field whichcause an ion spiraling down the magnetic field lines to reversedirection are termed mirror points for the ions. Ions which arereflected back and forth between the mirror points are effectivelytrapped within the magnetic bottle 10. Magnetic bottles 10 typically areused to contain plasmas at elevated temperatures and densities forstudies relating to space science and nuclear fusion.

A problem that has plagued the users of magnetic bottles is the bottles'tendency to leak or permit ions to escape. Ions within the plasmatrapped within a magnetic bottle experience an ambipolar potentialarising from the presence of the large number of ions contained within aconfined volume. This ambipolar potential causes the ions to drift alongthe magnetic field lines away from each other. A magnetic bottle mayleak in several ways and fail to contain these drifting ions. A magneticbottle 10 may leak by permitting ions, which should gyrate about a fieldline 32, to drift across field lines in a direction perpendicular to themagnetic field 32 and make contact with the walls of the vacuum chamber20. This occurs for example, when the operating pressure is high andion-neutral particle collisions cause ion drift motion perpendicular tothe magnetic field lines.

Alternatively, ions with ratios of v_(r) to v_(a) below a certain valueare not reflected by the mirror points at the ends of the magneticbottle 10 and escape from the ends of the magnetic bottle 10. It is thissecond type of leakage that is exploited by the ion implantationapparatus of the invention.

Specifically, an ion will be trapped between the mirror points if thefollowing condition holds: ##EQU1## where v_(r) is the radial velocitycomponent of the ion at the midplane of the magnetic bottle; v_(a) isaxial velocity component of the ion at the midplane of the magneticbottle; v_(o) is the total velocity of the ion at the midplane of themagnetic bottle (where v_(p) is defined by the expression v₂ ² =v_(a) ²+v_(r) ²) B_(o) is the magnetic field at the midplane of the magneticbottle; B_(m) is the maximum B field at the regions of convergence;θ_(m) is the maximum pitch angle (defined as Tan⁻¹ (v_(r) /v_(a))) andR_(m), the mirror ratio (defined as B_(m) /B_(o)). An individual ion istherefore trapped within the magnetic bottle if its radial velocitycomponent, v_(r), satisfies the following condition. ##EQU2##

Although the above expression holds for a single ion, a large number ofparticles in a plasma, each of mass M, may be considered statisticallyas having temperature components T.sub.⊥ (perpendicular temperature) andT.sub.μ (parallel temperature) which correspond to the velocitycomponents of the individual particles perpendicular (v_(r)) to andparallel (v_(a)) to, respectively, the field lines of the magneticbottle. For a plasma having a particle density (n), a Maxwelliandistribution of particle velocities, and a parallel drift velocity,v_(d)μ, (caused by the ambipolar potential described previously), thedensity of the particles trapped within the confines of the magneticbottle (n_(T)) is given by the expression: ##EQU3##

where (v_(d)μ) is the average parallel drift velocity.

Therefore, by adjusting the ratio of the radial to the axial velocitycomponents of the ions of interest (and therefore adjusting the ratio ofT.sub.⊥ to T.sub.μ), the ions of interest may be selectively retainedwithin a magnetic bottle or selectively permitted to escape the magneticbottle. Referring to FIG. 2, the normalized trapped ion density (definedas n_(t) /n), is plotted against the normalized drift velocity((V_(d)μ)) for various ratios of (T.sub.⊥ /T.sub.μ) (R_(m) -1).

In order to understand the results shown in the graph, consider the casein which (V_(d)μ)=5 and R_(m) =2 (hence a_(m) =T.sub.μ /T.sub.⊥). Then,for (T.sub.⊥ /T.sub.μ) ratios of from 10 to 100 (and hence a⁻¹ _(m)=10→100), the normalized density ranges from 0.3 to 0.9. This indicatesthat some 30% to 90% of the selected ions having a ratio ofperpendicular temperature to parallel temperature, (T.sub.⊥ /T.sub.μ),of from 10 to 100 are trapped in the magnetic bottle. Conversely,virtually none of the ions with a ratio of T.sub.⊥ /T.sub.μ =1 remain inthe magnetic bottle. Thus, by selectively heating the desired ions to(T.sub.⊥ /T.sub.μ) ratios <10 and not heating the undesired ions(therefore permitting them to have T.sub.⊥ /Tμ ratio approximately 1),the desired ions can be selectively retained in the magnetic bottle. Thepresent invention utilizes the above relationships to select ions forimplantation.

In brief overview, one embodiment of the ion implantation apparatus ofthe invention, shown in FIG. 3, includes an outer containment vessel 20having an electromagnetic coil 30, 30' adjacent each end of the outercontainment vessel 20. The outer containment vessel 20 is typically madeof an appropriate insulator such as quartz or glass. In anotherembodiment, the outer containment vessel 20 is constructed of anon-ferromagnetic metal, but in such an embodiment, an rf antenna usedto heat the plasma (as discussed below) must be placed within the outercontainment vessel 20. A direct current passing through the coils 30,30' (in one embodiment 500 amp-turns) in the same direction causes amagnetic field to be generated between the coils 30, 30' within theouter containment vessel 20.

The magnetic field lines 32, as described previously, are more closelyspaced and hence, have a higher density in the regions of the coils 30,30' than in the regions intermediate the coils 30, 30'. Typically themagnetic field 32 ranges from about 875 gauss adjacent the coils 30, 30'to about 400 gauss midway between the coils for the embodimentdescribed. Thus the magnetic field 32 within the outer containmentvessel 20 forms a magnetic bottle for trapping a plasma between thecoils 30, 30' within the outer containment vessel 20 as discussedpreviously. The dimensions of the bottle and the strength of themagnetic field are chosen such that an ion executes about ten gyrationsbefore being reflected at the mirror points. Typically the magneticbottle is between 0.5 and 1 meter in length for the magnetic fieldstrengths discussed above.

At each end of the external containment vessel 20 is located an ioncollector 140. Ion collector 140 is an negatively biased conductor whichneutralizes any ions which pass through the mirror. The resultingneutral molecules are then removed from the external containment vessel20 by a vacuum pump as discussed below. Alternatively, the ion collectormay be used in conjunction with an ion analyzer to monitor the selectionof ion species.

Within the external containment vessel 20 is located a wafer holder 110which positions a wafer 115 within the plasma 160 contained within themagnetic bottle. In one embodiment, the wafer holder 110 is constructedfrom a conductor, such as stainless steel, coated or covered with aninsulator 112, such as quartz, and connected to a negative constant DCor pulsed bias voltage source 122 which biases the wafer 115 to apredefined negative potential. The bias electrical potential applied tothe wafer holder 110 contributes to the implantation energy of the ions.A bias voltage of between 1-100 kV is normally applied.

In the embodiment shown in FIG. 3, a vacuum pump (not shown) maintains adecreased pressure within the magnetic bottle by applying a vacuum atone or both ends of the containment vessel 20. Alternatively, the vacuumpump can apply a vacuum elsewhere in the containment vessel 20.Similarly, a gas inlet (not shown) for introducing, into the containmentvessel 20, a gas which is to be ionized into a plasma is located withinthe containment vessel 20. Typically such an inlet is located adjacentthe region in which the plasma is being created. In one embodiment, amicrowave source is used to initially ionize the gas entering thecontainment vessel 20. In another embodiment an rf antenna is used togenerate the plasma.

Adjacent to and external to the outer containment vessel 20 and betweenthe coils 30, 30' is located an ion cyclotron resonance heating (ICRH)antenna 130. The ICRH antenna 130 is connected to a radio frequencygenerator 132 operating at frequencies approximately in the range of12.5 to 113 kHz at from approximately 100W to 10 kW of power. The ICRHantenna 130 produces a radio frequency field which causes ions of theplasma to increase their radius of gyration about the magnetic fieldlines of the magnetic bottle and therefore increases the ions'perpendicular velocity component v_(r). It should be noted that if acontainment vessel 20 of aluminum is used, the ICRH antenna 130 must belocated within the containment vessel 20. It should also be noted thatif a high power ICRH system is used, the ICRH system may be used togenerate the plasma.

In general, as the plasma is heated, ions 162 having a ratio of radialvelocity, v_(r), to axial velocity, v_(a), greater than or equal to thepredetermined value of (1/(R_(m) -1))^(1/2), as determined by thestrength of the magnetic field in the mirror region 150, are reflectedby the mirror region 150 back into the magnetic bottle and areconstrained to reside within the plasma 160 in the region of the wafer115. Conversely, ions 164 having a ratio of radial velocity v_(r) toaxial velocity v_(a) less than the predefined value pass through themirror regions 150, escape from the magnetic bottle, and are removedfrom the containment vessel 20. Thus, by selectively heating the ions ofinterest with a rf field, ions may be selectively retained within themagnetic bottle.

To understand how this may be accomplished, consider that the equationof motion for a single ion is given by the expression: ##EQU4##

where v=v_(x) +jv_(y), E=E_(x) +j E_(y) (for a left-circularly polarizedrf wave), q is the charge on the ion, ω_(pi) is the plasma ion angularfrequency and ω is the rf-frequency. ω_(pi) is defined, for each j_(th)ion species in the plasma, by the equation: ##EQU5##

where n_(j) is the refractive index of the j^(th) ion plasma, q_(j) isthe charge of the j^(th) m_(j) is the mass of the j^(th) ion and ε_(o)is the permitivity. Therefore solving for v: ##EQU6##

For the whole ion distribution, the square average velocity <v> is givenby the expression: ##EQU7##

where e² is the square of the charge on an electron.

The heating rate (the rate of change of the average kinetic energy ofthe ions) for a plasma heated using ion cyclotron resonance is given bythe expression: ##EQU8##

In particular, and as a first approximation, assuming that the E-fieldwithin the plasma is approximately equal to the E-field in a vacuum andassuming that the field is linearly polarized, ##EQU9##

where μ_(o) is the permeability constant, I is the current in theantenna and F(ρ,z) is the distribution function for the electric fieldgenerated by the antenna in polar coordinates.

Since the time t it takes an ion to go from its starting position Z₀ tolocation Z is given by the equation t=(z-z₀)/v.sub.∥, the perpendicularkinetic energy of the ions of the plasma is given by the expression:##EQU10##

where the plasma source is positioned at z₀, and z₁ is the location awayfrom the antenna at which the electric field from the antenna isnegligible. The antenna is assumed to be located at z=0.

For a loop antenna, the function F(ρ,θ) is given by the expression:##EQU11##

where a is the radius of the loop antenna, r is the distance to a pointin space from the center of the antenna, θ is the angle measured betweenr and the z-coordinate perpendicular to the loop antenna, φ is theazimuthal angle measured between an arbitrary 0° reference point and thepoint in space and β is the propagation constant (FIG. 3a).

Assuming that the magnetic field is uniform near the antenna, and thatthe rf frequency ω is equal to the cyclotron angular frequency ω_(ci)which is given by the expression: ##EQU12##

Then the increase in the perpendicular component of temperature(T.sub.⊥) as the ion traverses once the rf-field generated by the loopICRH antenna is given by the expression: ##EQU13##

where T.sub.⊥ (eV) is the perpendicular temperature in electron volts(eV) of the ion after passing through the ICRH field; T.sub.⊥0 (eV) isthe initial perpendicular temperature in electron volts (eV) of the ion;I is the current in the antenna, T.sub.∥ (eV) is the paralleltemperature of the ion, and ρ is the radial distance to the ionnormalized to the radius of the loop antenna. FIG. 3(a) depicts a graphof the single pass increase of the perpendicular temperature of an ionin a 800 G magnetic field plotted against normalized radius ρ for asimple loop antenna carrying a current of 100A. In this example, T.sub.∥=T.sub.⊥ =0.2 eV, z₀ =0 and z₁ =1. As can be seen, ions nearest the loopantenna have the highest heating rate. FIG. 3 (b) depicts the same plotfor a 8 kg magnetic field. Notice that as the magnetic field isincreased by a factor of 10, the heating rate is increased by a factorof 100. Other antenna configurations are possible.

Thus, the species of the ions desired for implantation may beselectively modified so that the desired ions are selectively retainedwithin the magnetic bottle to thereby selectively enrich theirconcentration in the plasma.

FIG. 4 depicts another embodiment of the ion implantation apparatus ofthe invention. In this embodiment an outer containment vessel 20' isconstructed of an insulator, such as quartz, or aluminum (coatedinternally with quartz as described above) and is open at one end to avacuum pump 202. The outer containment vessel 20 is closed at its otherend by a microwave transparent window 200. External to the outercontainment vessel 20' and adjacent to the microwave transparent window200 is a microwave waveguide 210 which transmits microwaves from a 1 KWmicrowave generator 212 through the microwave transparent window 200into the interior of the outer containment vessel 20'.

The outer containment vessel 20' may be considered as being dividedroughly into three regions. The first region 220, the plasma ionizationregion, is internal to the outer containment vessel 20' and adjacent tothe microwave transparent window 200. In this region, microwaves fromthe microwave generator 212 ionize the gas 214 introduced from a gassource 232 into the outer containment vessel 20' through a gas inlet 230adjacent the microwave transparent window 200. The selection of the gasintroduced into the containment vessel is determined by what ions are tobe implanted. Examples of gases which are used as sources ofimplantation ions are BF₃, PH₃, and B₂ H₆, among others.

The second region 222 of the outer containment vessel 20' is the regionbetween the electromagnetic coils 30, 30' which generate the magneticfield. Ions 234 from the ionized gas 214 move into the region of themagnetic bottle internal to the outer containment vessel 20' and betweenthe magnetic field coils 30, 30'. A differential pump 240, having aninlet 242 adjacent the ionization region 220 is used to remove neutralgas molecules which might otherwise pass from the ionization region 220into the magnetic bottle region 222. This is done to reduce theion-neutral particle collisions and minimize the ion drift across themagnetic field lines.

As in the previous embodiment, adjacent to and external to the outercontainment vessel 20' is located an ICRH antenna 130', which isconnected to an rf generator 132'. This ICRH antenna 130' locatedbetween the magnetic field coils 30, 30' produces an rf field whichincreases the perpendicular temperature of the selected ions in theplasma, as discussed previously. Again, as the plasma is heated, ions162' having a radial velocity, v_(r), to axial velocity, v_(a), ratiogreater less than a predetermined value are reflected back into themagnetic bottle and are constrained to reside within the plasma 160'.Ions 164' having a radial velocity, v_(r), greater than a predefinedvalue as discussed previously escape from the magnetic bottle.

Some of the ions 164', which escape the magnetic bottle, pass into thethird region 224' of the outer containment vessel 20', the implantationregion. In one embodiment, second differential pump 234 having an inputport 236 in the area of the outer containment vessel 20' between themagnetic bottle region 222 and the implantation region 224 again is usedto further reduce the density of neutral gas molecules in theimplantation region 224. A third electromagnetic coil 240, locatedexternal to the outer containment vessel 20' and near the end of theouter containment vessel 20' connected to the vacuum pump 202, makes themagnetic field 250 uniform in the vicinity of the implantation region224.

A wafer holder 110' is positioned within the outer confinement vessel20' adjacent the opening to the vacuum pump 202. As in the otherembodiment, the conductive wafer holder 110' coated by an insulator 112'positions the wafer 115 within the implantation region 224. Theconductive wafer holder 110' is connected to a negative high voltageconstant DC or pulse source 122' which electrically biases theconductive wafer holder 110' and hence the wafer 115 to a predefinednegative potential. Thus, unlike the previous embodiment (FIG. 3) inwhich the desired ions are contained within the magnetic bottle in thevicinity of the wafer 115, in this embodiment the desired ions areselected to escape the magnetic bottle and bombard the wafer 115. Itshould be noted that although only one magnetic bottle is shown in thisembodiment, a sequence of magnetic bottles may be concatenated toproduce multiple ion selectors and further purify the implantationplasma.

It should also be noted that although the invention has been describedin terms of an ion implantation apparatus, with the proper gas mixture,the apparatus may be used to etch rather than implant a wafer. Theapparatus may also be used to select ions for deposition.

FIG. 5 depicts a portion of another embodiment of the implantationapparatus. This embodiment, which is depicted in conjunction with theembodiment of FIG. 4 (only the implantation region 224' being shown)utilizes an electrostatic grid assembly 280 located between the plasmaand the substrate holder 110". In this embodiment, the substrate holder110" is maintained at a large negative voltage relative to the plasma.Such a voltage is typically from -1 kV to -200 kV. The electrostaticgrid assembly 280 includes three individual grids. The grid 282 nearestthe plasma is held at 0V as is the as is the grid 284 nearest the wafer.The intermediate grid 286 is connected to electronic grid electronicswhich periodically switches the intermediate grid 286 between a positivevoltage greater than the source plasma potential, for example +100V, and0V causing the intermediate grid 286 to act as an electrostatic shutter.

When the intermediate grid 286 is at +100V, or any positive voltagegreater than the source plasma potential, the positive ions of theplasma are repelled and do not reach the wafer 115. When theintermediate grid 286 is set to 0V, the positive ions of the plasmaexperience the large negative potential at which the wafer holder 110"is being held. These positive ions then are simultaneously acceleratedby the potential and implant in the substrate 115 at depth determined bythe potential of the wafer 115. FIG. 5a depicts the relative voltages onthe various components of the ion implantation apparatus.

Thus it is possible to select positive ions for such processes as SiOxand deposit them to a predetermined depth. It should be noted that it ispossible to use the electrostatic grid in any plasma immersion apparatusto select the depth to which ions are to be implanted and not justplasma immersion apparatuses utilizing magnetic bottles.

Having shown the preferred embodiment, those skilled in the art willrealize many variations are possible which will still be within thescope and spirit of the claimed invention. Therefore, it is theintention to limit the invention only as indicated by the scope of theclaims.

What is claimed is:
 1. An ion implantation apparatus comprising:a magnetic bottle for selectively retaining ions; an ion cyclotron resonant frequency device for selectively heating ions retained within said magnetic bottle thereby permitting ions having predetermined characteristics to escape from said magnetic bottle; and a wafer holder positioned to expose a wafer to ions selectively retained within said magnetic bottle.
 2. The apparatus of claim 1 wherein said wafer holder comprises a conductor coated with an insulator.
 3. The apparatus of claim 2 wherein said wafer holder is biased by a predefined negative potential.
 4. The apparatus of claim 3 wherein said predefined negative potential is provided by a constant DC source.
 5. The apparatus of claim 3 wherein said predefined negative potential is provided by a pulsed source.
 6. The apparatus of claim 1 further comprising at least one ion collector positioned adjacent said magnetic bottle to remove ions which escape from said magnetic bottle.
 7. The apparatus of claim 1 wherein said magnetic bottle is located within a an outer containment chamber.
 8. The apparatus of claim 7 wherein said ion cyclotron resonant frequency device comprises an ion cyclotron resonant antenna and a radio frequency generator.
 9. The apparatus of claim 8 wherein said ion cyclotron resonant antenna is located external to said outer containment chamber.
 10. The apparatus of claim 8 wherein said ion cyclotron resonant antenna is located within said outer containment chamber.
 11. The apparatus of claim 1 further comprising a plasma generating device for generating said ions within said magnetic bottle.
 12. An ion implantation apparatus comprising:a magnetic bottle for selectively retaining ions; an ion cyclotron resonant frequency device for selectively heating ions retained within the magnetic bottle thereby permitting ions having predetermined characteristics to escape from said magnetic bottle; and a wafer holder positioned to expose a wafer to ions which escape from the magnetic bottle.
 13. The apparatus of claim 12 wherein said wafer holder comprises a conductor coated with an insulator.
 14. The apparatus of claim 13 wherein said wafer holder is biased by a predefined negative potential.
 15. The apparatus of claim 14 wherein said predefined negative potential is provided by a constant DC source.
 16. The apparatus of claim 14 wherein said predefined negative potential is provided by a pulsed source.
 17. The apparatus of claim 12 wherein said magnetic bottle is located within a an outer containment chamber.
 18. The apparatus of claim 17 wherein said ion cyclotron resonant frequency device comprises a ion cyclotron resonant antenna and a radio frequency generator.
 19. The apparatus of claim 18 wherein said ion cyclotron resonant antenna is located external to said outer containment chamber.
 20. The apparatus of claim 19 wherein said ion cyclotron resonant antenna is located within said outer containment chamber.
 21. The apparatus of claim 12 further comprising at least one additional electromagnet positioned to provide a uniform magnetic field in the vicinity of said wafer holder.
 22. The apparatus of claim 12 further comprising a plasma generating device for generating said ions within said magnetic bottle.
 23. A method for ion implantation comprising:selectively retaining ions within a magnetic bottle; selectively heating ions retained within the magnetic bottle with an ion cyclotron resonant frequency device, thereby permitting ions having predetermined characteristics to escape from said magnetic bottle; and exposing a wafer to ions selectively retained within said magnetic bottle.
 24. A method of ion implantation comprising:selectively retaining ions within a magnetic bottle; selectively heating ions retained within the magnetic bottle with an ion cyclotron resonant frequency device, thereby permitting ions having predetermined characteristics to escape from said magnetic bottle; and exposing a wafer selectively to ions which escape from the magnetic bottle. 